Invention Grant
US09385136B2 Silicon dot formation by self-assembly method and selective silicon growth for flash memory
有权
通过自组装方法形成硅点,并对闪存进行选择性硅生长
- Patent Title: Silicon dot formation by self-assembly method and selective silicon growth for flash memory
- Patent Title (中): 通过自组装方法形成硅点,并对闪存进行选择性硅生长
-
Application No.: US14745568Application Date: 2015-06-22
-
Publication No.: US09385136B2Publication Date: 2016-07-05
- Inventor: Chih-Ming Chen , Tsung-Yu Chen , Cheng-Te Lee , Szu-Yu Wang , Chung-Yi Yu , Chia-Shiung Tsai , Xiaomeng Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L27/115 ; H01L21/32 ; H01L21/28 ; H01L29/66 ; H01L21/8239 ; H01L21/3213 ; H01L21/3205 ; H01L21/02 ; H01L29/423 ; H01L21/308 ; H01L21/311 ; H01L29/06 ; H01L29/51 ; H01L29/792

Abstract:
Some embodiments of the present disclosure relate to a method that achieves a substantially uniform pattern of discrete storage elements within a memory cell. A copolymer solution having first and second polymer species is spin-coated onto a surface of a substrate and subjected to self-assembly into a phase-separated material having a regular pattern of micro-domains of the second polymer species within a polymer matrix having the first polymer species. The second polymer species is then removed resulting with a pattern of holes within the polymer matrix. An etch is then performed through the holes utilizing the polymer matrix as a hard-mask to form a substantially identical pattern of holes in a dielectric layer disposed over a seed layer disposed over the substrate surface. Epitaxial deposition onto the seed layer then utilized to grow a substantially uniform pattern of discrete storage elements within the dielectric layer.
Public/Granted literature
- US20150287737A1 SILICON DOT FORMATION BY SELF-ASSEMBLY METHOD AND SELECTIVE SILICON GROWTH FOR FLASH MEMORY Public/Granted day:2015-10-08
Information query
IPC分类: