发明授权
- 专利标题: MEMS lifetime enhancement
- 专利标题(中): MEMS寿命增强
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申请号: US13916675申请日: 2013-06-13
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公开(公告)号: US09336953B2公开(公告)日: 2016-05-10
- 发明人: Cong Quoc Khieu , Vikram Joshi , Richard L. Knipe
- 申请人: CAVENDISH KINETICS INC.
- 申请人地址: US CA San Jose
- 专利权人: CAVENDISH KINETICS INC.
- 当前专利权人: CAVENDISH KINETICS INC.
- 当前专利权人地址: US CA San Jose
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: H01G5/16
- IPC分类号: H01G5/16 ; B81B7/02 ; H01G5/18 ; H01G5/38 ; H01H59/00
摘要:
The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.
公开/授权文献
- US20130335878A1 MEMS LIFETIME ENHANCEMENT 公开/授权日:2013-12-19
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