发明授权
US09318389B1 Integrated circuit having plural transistors with work function metal gate structures
有权
具有多个具有功函数金属栅结构的晶体管的集成电路
- 专利标题: Integrated circuit having plural transistors with work function metal gate structures
- 专利标题(中): 具有多个具有功函数金属栅结构的晶体管的集成电路
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申请号: US14520342申请日: 2014-10-22
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公开(公告)号: US09318389B1公开(公告)日: 2016-04-19
- 发明人: Chih-Wei Yang , Yu-Feng Liu , Jian-Cun Ke , Chia-Fu Hsu , Yu-Ru Yang , En-Chiuan Liou
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Science-Based Industrial Park, Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Science-Based Industrial Park, Hsin-Chu
- 代理商 Winston Hsu; Scott Margo
- 优先权: CN201410500432 20140926
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L27/08 ; H01L29/49 ; H01L29/40 ; H01L21/28 ; H01L21/8234 ; H01L27/088 ; H01L29/423
摘要:
The present invention provides an integrated circuit including a substrate, a first transistor, a second transistor and a third transistor. The first transistor has a first metal gate including a first bottom barrier layer, a first work function metal layer and a first metal layer. The second transistor has a second metal gate including a second bottom barrier layer, a second work function metal layer and a second metal layer. The third transistor has a third metal gate including a third bottom barrier layer, a third work function metal layer and a third metal layer. The first transistor, the second transistor and the third transistor has the same conductive type. A nitrogen concentration of the first bottom barrier layer>a nitrogen concentration of the second bottom barrier layer>a nitrogen concentration of the third bottom barrier layer.
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