Invention Grant
- Patent Title: Large-mesh cell-projection electron-beam lithography method
- Patent Title (中): 大网格细胞投影电子束光刻法
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Application No.: US13641125Application Date: 2011-04-13
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Publication No.: US09235132B2Publication Date: 2016-01-12
- Inventor: Serdar Manakli
- Applicant: Serdar Manakli
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR1052866 20100415
- International Application: PCT/EP2011/055861 WO 20110413
- International Announcement: WO2011/128391 WO 20111020
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54 ; G03C5/00 ; G21G5/00 ; H01J3/14 ; G03F7/20 ; B82Y10/00 ; B82Y40/00 ; H01J37/317

Abstract:
A lithography method based on the projection of cells, notably direct-write electron-beam lithography. One of the main limitations of the methods of this type in the prior art is the writing time. To overcome this limitation, according to the method of the invention, the size of the cells is increased to the maximum aperture of the lithography device. Advantageously, this size increase is obtained by modifying the size of the apertures of the projection stencil level closest to the substrate to be etched. Advantageously, a strip is added to the outside of the block to be etched onto which is radiated a dose calculated to optimize the process energy latitude. Advantageously, this strip is spaced apart from the edge of the block to be etched. Advantageously, the projected cells are not adjoining.
Public/Granted literature
- US20130201467A1 LARGE-MESH CELL-PROJECTION ELECTRON-BEAM LITHOGRAPHY METHOD Public/Granted day:2013-08-08
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