Invention Grant
US09182543B2 Optical integrated circuits, semiconductor devices including the same, and methods of manufacturing the same 有权
光集成电路,包括其的半导体器件及其制造方法

Optical integrated circuits, semiconductor devices including the same, and methods of manufacturing the same
Abstract:
An optical integrated circuit may include a substrate including a single crystalline semiconductor material, a passive element extending in a crystal orientation of the substrate and including the single crystalline semiconductor material, and an active element extending in a crystal orientation of the substrate and including the single crystalline semiconductor material.
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