Invention Grant
- Patent Title: Dice before grind with backside metal
- Patent Title (中): 研磨前的骰子与背面金属
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Application No.: US13928676Application Date: 2013-06-27
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Publication No.: US09165831B2Publication Date: 2015-10-20
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Charles F. Musante , Christopher D. Muzzy , Wolfgang Sauter , Timothy D. Sullivan
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Anthony Canale
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/283

Abstract:
A method including forming a plurality of dicing channels in a front side of a wafer; the plurality of dicing channels including a depth at least greater than a desired final thickness of the wafer, filling the plurality of dicing channels with a fill material and removing a portion of the wafer from a back side of the wafer until the desired final thickness is achieved, where a portion of the fill material within the plurality of dicing channel is exposed. The method further including depositing a metal layer on the back side of the wafer; removing the fill material from within the plurality of dicing channels to expose the metal layer at a bottom of the plurality of dicing channels, and removing a portion of the metal layer located at the bottom of the plurality of dicing channels.
Public/Granted literature
- US20150001683A1 DICE BEFORE GRIND WITH BACKSIDE METAL Public/Granted day:2015-01-01
Information query
IPC分类: