发明授权
- 专利标题: Polysilicon-based thin film transistor
- 专利标题(中): 基于多晶硅的薄膜晶体管
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申请号: US13713589申请日: 2012-12-13
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公开(公告)号: US09136353B2公开(公告)日: 2015-09-15
- 发明人: Jun-Hee Choi , Andrei Zoulkarneev
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2007-0003070 20070110
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L31/036 ; H01L29/76 ; H01L31/112 ; H01L29/66 ; H01L29/423 ; H01L29/45 ; H01L29/49 ; H01L29/786 ; H01L21/02
摘要:
A method of forming polysilicon, a thin film transistor (TFT) using the polysilicon, and a method of fabricating the TFT are disclosed. The method of forming the polysilicon comprises: forming an insulating layer on a substrate; forming a first electrode and a second electrode on the insulating layer; forming at least one heater layer on the insulating layer so as to connect the first electrode and the second electrode; forming an amorphous material layer containing silicon on the heater layer(s); forming a through-hole under the heater layer(s) by etching the insulating layer; and crystallizing the amorphous material layer into a polysilicon layer by applying a voltage between the first electrode and the second electrode so as to heat the heater layer(s).
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