Invention Grant
US08835316B2 Transistor with primary and semiconductor spacer, method for manufacturing transistor, and semiconductor chip comprising the transistor 有权
具有初级和半导体衬垫的晶体管,晶体管的制造方法和包括晶体管的半导体芯片

Transistor with primary and semiconductor spacer, method for manufacturing transistor, and semiconductor chip comprising the transistor
Abstract:
The disclosure provides a transistor, a method for manufacturing the transistor, and a semiconductor chip comprising the transistor. The transistor comprises: an active area, a gate stack, a primary spacer, and source/drain regions, wherein the active area is on a semiconductor substrate; the gate stack, the primary spacer, and the source/drain regions are on the active area; the primary spacer surrounds the gate stack; the source/drain regions are embedded in the active area and self-aligned with opposite sides of the primary spacer. Wherein the transistor further comprises: a silicide spacer, wherein the silicide spacer is located at opposite sides of the primary spacer, and a dielectric material is filled between the two ends of the silicide spacer in the width direction of the gate stack, so as to isolate the source/drain regions from each other.
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