发明授权
- 专利标题: Wiring board, semiconductor device, and method for manufacturing wiring board
- 专利标题(中): 接线板,半导体器件和制造布线板的方法
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申请号: US13449034申请日: 2012-04-17
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公开(公告)号: US08810007B2公开(公告)日: 2014-08-19
- 发明人: Akihito Takano , Masahiro Sunohara , Hideaki Sakaguchi , Mitsutoshi Higashi , Kenichi Ota , Yuichi Sasajima
- 申请人: Akihito Takano , Masahiro Sunohara , Hideaki Sakaguchi , Mitsutoshi Higashi , Kenichi Ota , Yuichi Sasajima
- 申请人地址: JP Nagano-ken JP Tokyo
- 专利权人: Shinko Electric Industries Co., Ltd.,Taiyo Yuden Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.,Taiyo Yuden Co., Ltd.
- 当前专利权人地址: JP Nagano-ken JP Tokyo
- 代理机构: Fish & Richardson P.C.
- 优先权: JP2011-092202 20110418
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L23/498 ; H01L23/50 ; H05K1/03 ; H05K1/16
摘要:
A wiring board provided with a silicon substrate including a through hole that communicates a first surface and a second surface of the silicon substrate. A capacitor is formed on an insulating film, which is applied to the silicon substrate, on the first surface and a wall surface defining the through hole. A capacitor part of the capacitor includes a first electrode, a dielectric layer, and a second electrode that are sequentially deposited on the insulating film on the first surface and the wall surface of the through hole. A penetration electrode is formed in the through hole covered by the first electrode, the dielectric layer, and the second electrode of the capacitor part.
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