发明授权
- 专利标题: 3D built-in self-test scheme for 3D assembly defect detection
- 专利标题(中): 3D内置的3D装配缺陷检测自检方案
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申请号: US13733071申请日: 2013-01-02
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公开(公告)号: US08793547B2公开(公告)日: 2014-07-29
- 发明人: Siang Poh Loh , Chooi Pei Lim
- 申请人: Altera Corporation
- 申请人地址: US CA San Jose
- 专利权人: Altera Corporation
- 当前专利权人: Altera Corporation
- 当前专利权人地址: US CA San Jose
- 代理机构: Weaver Austin Villeneuve & Sampson LLP
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/3177 ; H01L25/065 ; G01R31/3185 ; G01R31/3187
摘要:
Techniques and mechanisms are provided for an improved built in self-test (BIST) mechanism for 3D assembly defect detection. According to an embodiment of the present disclosure, the described mechanisms and techniques can function to detect defects in interconnects which vertically connect different layers of a 3D device, as well as to detect defects on a 2D layer of a 3D integrated circuit. Additionally, according to an embodiment of the present disclosure, techniques and mechanisms are provided for determining not only the presence of a defect in a given set of interfaces of an integrated circuit, but the particular interface at which a defect may exist.
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