发明授权
- 专利标题： Vertical type sensor
- 专利标题（中）： 立式传感器
-
申请号： US13009440申请日： 2011-01-19
-
公开(公告)号： US08723503B2公开(公告)日： 2014-05-13
- 发明人: Hsiao-Wen Zan , Hsin-Fei Meng , Ming-Zhi Dai , Yu-Chiang Chao
- 申请人： Hsiao-Wen Zan , Hsin-Fei Meng , Ming-Zhi Dai , Yu-Chiang Chao
- 申请人地址： TW Hsinchu
- 专利权人： National Chiao Tung University
- 当前专利权人： National Chiao Tung University
- 当前专利权人地址： TW Hsinchu
- 代理机构： Edwards Wildman Palmer LLP
- 代理商 Peter F. Corless; Steven M. Jensen
- 优先权： TW99134543A 20101011
- 主分类号： H01L29/08
- IPC分类号： H01L29/08 ; H01L21/00 ; G01N33/543 ; H01L51/52 ; H01L51/05 ; G01N27/414
摘要：
The present invention provides a vertical type sensor, including a substrate; a first electrode formed on the substrate; a sensing layer formed on the first electrode layer and reactive to a target substance, wherein the first electrode layer is interposed between the substrate and the sensing layer; and a second electrode layer formed on the sensing layer and having a plurality of openings, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer, and the target substance contacts the sensing layer via the plurality of openings. The vertical type sensor of the present invention provides instant, sensitive and rapid detection.
公开/授权文献
- US20120086431A1 VERTICAL TYPE SENSOR 公开/授权日：2012-04-12
信息查询
IPC分类:
