Invention Grant
- Patent Title: Electroless deposition of platinum on copper
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Application No.: US13333509Application Date: 2011-12-21
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Publication No.: US08545998B2Publication Date: 2013-10-01
- Inventor: Bob Kong , Igor Ivanov , Zhi-Wen Sun , Jinhong Tong
- Applicant: Bob Kong , Igor Ivanov , Zhi-Wen Sun , Jinhong Tong
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B32B9/00
- IPC: B32B9/00 ; B32B19/00 ; H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
Embodiments of the current invention describe a method of plating platinum selectively on a copper film using a self-initiated electroless process. In particular, platinum films are plated onto very thin copper films having a thickness of less than 300 angstroms. The electroless plating solution and the resulting structure are also described. This process has applications in the semiconductor processing of logic devices, memory devices, and photovoltaic devices.
Public/Granted literature
- US20120091590A1 Electroless Deposition of Platinum on Copper Public/Granted day:2012-04-19
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