发明授权
- 专利标题： Ion deflector for two-dimensional control of ion beam cross sectional spread
- 专利标题（中）： 离子导流板二维控制离子束横截面扩展
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申请号： US12708886申请日： 2010-02-19
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公开(公告)号： US08309936B2公开(公告)日： 2012-11-13
- 发明人: Holger Kreckel , Hjalmar Bruhns , Daniel Wolf Savin
- 申请人： Holger Kreckel , Hjalmar Bruhns , Daniel Wolf Savin
- 申请人地址： US NY New York City
- 专利权人： Trustees of Columbia University in the City of New York
- 当前专利权人： Trustees of Columbia University in the City of New York
- 当前专利权人地址： US NY New York City
- 代理机构： Evans & Molinelli PLLC
- 代理商 Eugene J. Molinelli
- 主分类号： H01J3/34
- IPC分类号： H01J3/34
摘要：
An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.
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