公开(公告)号：US08309936B2

公开(公告)日：2012-11-13

申请号：US12708886

申请日：2010-02-19

Applicant: Holger Kreckel ,  Hjalmar Bruhns ,  Daniel Wolf Savin

Inventor： Holger Kreckel ,  Hjalmar Bruhns ,  Daniel Wolf Savin

IPC: H01J3/34

CPC classification number: H01J37/1472 ,  H01J2237/151 ,  H01J2237/153

Abstract: An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.

Abstract translation: 用于沿着偏转平面中的电弧偏转带电粒子束的离子偏转器包括一对适于用不同电压充电的非球面偏转电极。 一对偏转电极被配置为在偏转平面和垂直于偏转平面的方向上控制带电粒子在离开离子偏转器的偏转光束中的横截面扩展。 在一些实施例中，第一电极具有垂直于偏转平面的第一高度，而第二电极具有不同的第二高度。

公开(公告)号：US20100219352A1

公开(公告)日：2010-09-02

申请号：US12708886

申请日：2010-02-19

Applicant: Holger Kreckel ,  Hjalmar Bruhns ,  Daniel Wolf Savin

Inventor： Holger Kreckel ,  Hjalmar Bruhns ,  Daniel Wolf Savin

IPC: H01J3/34

CPC classification number: H01J37/1472 ,  H01J2237/151 ,  H01J2237/153

Abstract: An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.

Abstract translation: 用于沿着偏转平面中的电弧偏转带电粒子束的离子偏转器包括一对适于用不同电压充电的非球面偏转电极。 一对偏转电极被配置为在偏转平面和垂直于偏转平面的方向上控制带电粒子在离开离子偏转器的偏转光束中的横截面扩展。 在一些实施例中，第一电极具有垂直于偏转平面的第一高度，而第二电极具有不同的第二高度。