发明授权
- 专利标题: Method and apparatus for forming a thin lamina
- 专利标题(中): 用于形成薄层的方法和装置
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申请号: US13331909申请日: 2011-12-20
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公开(公告)号: US08268645B2公开(公告)日: 2012-09-18
- 发明人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
- 申请人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
- 申请人地址: US CA San Jose
- 专利权人: Twin Creeks Technologies, Inc.
- 当前专利权人: Twin Creeks Technologies, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: The Mueller Law Office
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H02N6/00
摘要:
A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.
公开/授权文献
- US20120171809A1 Method and Apparatus for Forming a Thin Lamina 公开/授权日:2012-07-05
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