发明授权
US08268645B2 Method and apparatus for forming a thin lamina 有权
用于形成薄层的方法和装置

Method and apparatus for forming a thin lamina
摘要:
A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.
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