发明授权
- 专利标题: Three-dimensional stacked substrate arrangements
- 专利标题(中): 三维堆叠衬底布置
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申请号: US13103267申请日: 2011-05-09
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公开(公告)号: US08203208B2公开(公告)日: 2012-06-19
- 发明人: Shriram Ramanathan , Patrick Morrow , Scott List , Michael Y. Chan , Mauro J. Kobrinsky , Sarah E. Kim , Kevin P. O'Brien , Michael C. Harmes , Thomas Marieb
- 申请人: Shriram Ramanathan , Patrick Morrow , Scott List , Michael Y. Chan , Mauro J. Kobrinsky , Sarah E. Kim , Kevin P. O'Brien , Michael C. Harmes , Thomas Marieb
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Winkle, PLLC
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/44
摘要:
Three-dimensional stacked substrate arrangements with reliable bonding and inter-substrate protection.
公开/授权文献
- US20110260319A1 THREE-DIMENSIONAL STACKED SUBSTRATE ARRANGEMENTS 公开/授权日:2011-10-27
信息查询
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