Invention Grant
US08048800B2 Fabrication method of two-terminal semiconductor component using trench technology
有权
使用沟槽技术的二端子半导体元件的制造方法
- Patent Title: Fabrication method of two-terminal semiconductor component using trench technology
- Patent Title (中): 使用沟槽技术的二端子半导体元件的制造方法
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Application No.: US12603766Application Date: 2009-10-22
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Publication No.: US08048800B2Publication Date: 2011-11-01
- Inventor: Jin-Koo Rhee , Seong-Dae Lee , Mi-Ra Kim , Dae-Hong Min , Wan-Joo Kim
- Applicant: Jin-Koo Rhee , Seong-Dae Lee , Mi-Ra Kim , Dae-Hong Min , Wan-Joo Kim
- Applicant Address: KR Seoul
- Assignee: Dongguk University Industry—Academic Corporation Foundation
- Current Assignee: Dongguk University Industry—Academic Corporation Foundation
- Current Assignee Address: KR Seoul
- Agency: Grossman Tucker Perreault & Pfleger, PLLC
- Priority: KR10-2008-0105029 20081024
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/311

Abstract:
A method of fabricating a two-terminal semiconductor component using a trench technique is disclosed that includes forming a trench by etching an etching pattern formed on a substrate on which an active layer having impurities added is grown, forming a front metal layer on a front upper surface of the substrate by using an evaporation method or a sputtering method after removing the etching pattern, forming a metal plated layer on the front surface of the substrate on which the front metal layer is formed, polishing a lower surface of the substrate by using at least one of a mechanical polishing method and a chemical polishing method until the front metal layer is exposed, forming a rear metal layer on the polished substrate, and removing each component by using at least one of a dry etching method and a wet etching method.
Public/Granted literature
- US20110059609A1 FABRICATION METHOD OF TWO-TERMINAL SEMICONDUCTOR COMPONENT USING TRENCH TECHNOLOGY Public/Granted day:2011-03-10
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