发明授权
- 专利标题: Aluminum nitride sintered body and method of preparing the same
- 专利标题(中): 氮化铝烧结体及其制备方法
-
申请号: US09357600申请日: 1999-07-20
-
公开(公告)号: US06271163B1公开(公告)日: 2001-08-07
- 发明人: Yasuhisa Yushio , Hirohiko Nakata , Kazutaka Sasaki , Masuhiro Natsuhara , Motoyuki Tanaka , Yasuhiro Murase
- 申请人: Yasuhisa Yushio , Hirohiko Nakata , Kazutaka Sasaki , Masuhiro Natsuhara , Motoyuki Tanaka , Yasuhiro Murase
- 优先权: JP10-206353 19980722
- 主分类号: C04B35581
- IPC分类号: C04B35581
摘要:
An aluminum nitride sintered body has excellent thermal shock resistance and strength, and is applicable to a radiating substrate for a power module or a jig for semiconductor equipment employed under a strict heat cycle. The aluminum nitride sintered body contains 0.01 to 5 percent by weight of an alkaline earth metal element compound in terms of an oxide and 0.01 to 10 percent by weight of a rare earth element compound in terms of an oxide, respectively as sintering aids, and a residual amount of carbon in a range from 0.005 to 0.1 percent by weight, thereby suppressing grain growth and improving thermal shock resistance and strength of the sintered body.
信息查询