发明授权
US6124606A Method of making a large area imager with improved signal-to-noise ratio
失效
制造具有改善的信噪比的大面积成像器的方法
- 专利标题: Method of making a large area imager with improved signal-to-noise ratio
- 专利标题(中): 制造具有改善的信噪比的大面积成像器的方法
-
申请号: US7177申请日: 1998-01-14
-
公开(公告)号: US6124606A公开(公告)日: 2000-09-26
- 发明人: Willem den Boer , John Z. Z. Zhong , Tieer Gu , Young H. Byun , Steven Aggas
- 申请人: Willem den Boer , John Z. Z. Zhong , Tieer Gu , Young H. Byun , Steven Aggas
- 申请人地址: MI Northville
- 专利权人: OIS Optical Imaging Systems, Inc.
- 当前专利权人: OIS Optical Imaging Systems, Inc.
- 当前专利权人地址: MI Northville
- 主分类号: G02F1/1362
- IPC分类号: G02F1/1362 ; G02F1/1368 ; H01L21/336 ; H01L21/77 ; H01L21/84 ; H01L27/12 ; H01L27/146 ; H01L29/786
摘要:
This invention is related to a radiation imager (e.g. x-ray imager) and method of making same. An insulating material having a low dielectric constant is provided in areas of overlap between collector electrodes and underlying TFTs, diodes, and/or address lines in order to improve the signal-to-noise ratio of the imager. The TFT array and corresponding imager are made in certain embodiments by coating the address lines and TFTs with a photo-imageable insulating layer which acts as a negative resist, exposing portions of the insulating layer with UV light, removing non-exposed areas of the insulating layer so as to form contact vias, and depositing storage capacitor collecting electrodes over the insulating layer so that the collecting electrodes contact TFT source electrodes through the contact vias. The resulting imager has an improved signal-to-noise ratio due to the low dielectric constant of the insulating layer.
公开/授权文献
- US4712318A Gripping element for a sports shoe 公开/授权日:1987-12-15
信息查询
IPC分类: