Invention Application
- Patent Title: METHODS FOR ADDING A PLURALITY OF DOPANT BATCHES TO AN INGOT PULLER APPARATUS
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Application No.: US18323775Application Date: 2023-05-25
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Publication No.: US20240392467A1Publication Date: 2024-11-28
- Inventor: Chun-Sheng Wu , Hong-Huei Huang , Hsien-Ta Tseng , Chen-Yi Lin , Feng-Chien Tsai , Yu-Chiao Wu , Benjamin Michael Meyer , Young Gil Jeong , Che-Min Chang , Carissima Marie Hudson
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: C30B15/04
- IPC: C30B15/04 ; C30B15/10 ; C30B15/14

Abstract:
Ingot puller apparatus for producing a doped single crystal silicon ingot are disclosed. The ingot puller apparatus includes a dopant feeder having a first dopant receptacle for holding a first batch of dopant and a second dopant receptacle for holding a second batch of dopant. A rotation mechanism rotates the first dopant receptacle to release the first batch of dopant into the crucible and rotates the second dopant receptacle to release the second batch of dopant into the crucible.
Information query
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