- 专利标题: NANOWIRE TRANSISTOR WITH SOURCE AND DRAIN INDUCED BY ELECTRICAL CONTACTS WITH NEGATIVE SCHOTTKY BARRIER HEIGHT
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申请号: US18750751申请日: 2024-06-21
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公开(公告)号: US20240347641A1公开(公告)日: 2024-10-17
- 发明人: Paul A. Clifton , Andreas Goebel , Walter A. Harrison
- 申请人: Acorn Semi, LLC
- 申请人地址: US CA Palo Alto
- 专利权人: Acorn Semi, LLC
- 当前专利权人: Acorn Semi, LLC
- 当前专利权人地址: US CA Palo Alto
- 分案原申请号: US15816231 2017.11.17
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; B82Y10/00 ; H01L29/06 ; H01L29/08 ; H01L29/417 ; H01L29/423 ; H01L29/775 ; H01L29/78
摘要:
A nanowire transistor includes undoped source and drain regions electrically coupled with a channel region. A source stack that is electrically isolated from a gate conductor includes an interfacial layer and a source conductor, and is coaxially wrapped completely around the source region, extending along at least a portion of the source region. A Schottky barrier between the source conductor and the source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.
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