Invention Publication
- Patent Title: GATE CUT AND FIN TRIM ISOLATION FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
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Application No.: US18732393Application Date: 2024-06-03
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Publication No.: US20240332399A1Publication Date: 2024-10-03
- Inventor: Tahir GHANI , Byron HO , Michael L. HATTENDORF , Christopher P. AUTH
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- The original application number of the division: US16386202 2019.04.16
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/02 ; H01L21/033 ; H01L21/28 ; H01L21/285 ; H01L21/308 ; H01L21/311 ; H01L21/762 ; H01L21/768 ; H01L21/8234 ; H01L21/8238 ; H01L23/00 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L27/02 ; H01L27/088 ; H01L27/092 ; H01L29/06 ; H01L29/08 ; H01L29/165 ; H01L29/167 ; H01L29/417 ; H01L29/51 ; H01L29/78 ; H10B10/00

Abstract:
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, a method includes forming a plurality of fins and forming a plurality of gate structures over the plurality of fins. A dielectric material structure is formed between adjacent ones of the plurality of gate structures. A portion of a first of the plurality of gate structures is removed to expose a first portion of each of the plurality of fins, and a portion of a second of the plurality of gate structures is removed to expose a second portion of each of the plurality of fins. The exposed first portion of each of the plurality of fins is removed, but the exposed second portion of each of the plurality of fins is not removed.
Information query
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