Invention Publication
- Patent Title: METHOD FOR PRODUCING III-N MATERIAL-BASED VERTICAL COMPONENTS
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Application No.: US18258784Application Date: 2021-12-22
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Publication No.: US20240047201A1Publication Date: 2024-02-08
- Inventor: Guy FEUILLET , Thierry BOUCHET , Matthew CHARLES , Roy DAGHER , Jesus ZUNIGA PEREZ
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee Address: FR Paris; FR Paris
- Priority: FR 13964 2020.12.22
- International Application: PCT/EP2021/087197 2021.12.22
- Date entered country: 2023-06-21
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/78 ; H01L29/78 ; H01L29/66 ; H01L29/872 ; H01L29/868 ; H01L21/8252 ; H01L27/08 ; H01L27/085
Abstract:
A method for producing a vertical component comprising with the basis of a III-N material, comprising providing platelets made of the III-N material obtained by epitaxy on pads, the platelets comprise at least first and second layers doped and stacked on one another in a vertical direction. The method further includes the production of a first electrode and the production of a second electrode located on the platelet and configured such that a current passing from one electrode to the other passes through at least the second layer in all of its thickness, the thickness being taken in the vertical direction.
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