Invention Publication
- Patent Title: OVERLAP SUSCEPTOR AND PREHEAT RING
-
Application No.: US18479297Application Date: 2023-10-02
-
Publication No.: US20240026522A1Publication Date: 2024-01-25
- Inventor: Zhepeng CONG , Schubert CHU , Nyi Oo MYO , Kartik Bhupendra SHAH , Zhiyuan YE , Richard O. COLLINS
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- The original application number of the division: US17224537 2021.04.07
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/50 ; H01L21/67

Abstract:
Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a liner for a processing chamber includes an annular body having a sidewall and a vent formed in the annular body for exhausting gas from inside to outside the annular body. The vent comprises one or more vent holes disposed through the sidewall. The liner further includes an opening in the annular body for substrate loading and unloading.
Information query
IPC分类: