发明公开
- 专利标题: MULTI-GATE SELECTOR SWITCHES FOR MEMORY CELLS AND METHODS OF FORMING THE SAME
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申请号: US18230846申请日: 2023-08-07
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公开(公告)号: US20230380186A1公开(公告)日: 2023-11-23
- 发明人: Yong-Jie WU , Yen-Chung HO , Hui-Hsien WEI , Chia-Jung YU , Pin-Cheng HSU , Mauricio MANFRINI , Chung-Te LIN
- 申请人: Taiwan Semiconductor Manufacturing Company Limited
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsinchu
- 分案原申请号: US17230664 2021.04.14
- 主分类号: H10B61/00
- IPC分类号: H10B61/00 ; H01L29/24 ; H01L29/66 ; H01L29/786 ; H01L21/02 ; H10B53/30 ; H10B63/00 ; H10N50/01 ; H10N70/00
摘要:
A memory structure includes: first and second word lines; a high-k dielectric layer disposed on the first and second word lines; a channel layer disposed on the high-k dielectric layer and comprising a semiconductor material; first and second source electrodes electrically contacting the channel layer; a first drain electrode disposed on the channel layer between the first and second source electrodes; a memory cell electrically connected to the first drain electrode; and a bit line electrically connected to the memory cell.
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