- 专利标题: INTEGRATED CIRCUITS AND METHOD OF MANUFACTURING THE SAME
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申请号: US17723532申请日: 2022-04-19
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公开(公告)号: US20220254779A1公开(公告)日: 2022-08-11
- 发明人: Jaeyeol Song , Seungha Oh , Rakhwan Kim , Minjung Park , Dongsoo Lee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2019-0146961 20191115
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L29/78 ; H01L29/51 ; H01L21/8234 ; H01L29/66
摘要:
An integrated circuit (IC) device includes first and second fin-type semiconductor active regions on a substrate. A plurality of first semiconductor patterns are provided, which are stacked on the first fin-type active region as a first plurality of spaced-apart channel regions of a first FINFET. A plurality of second semiconductor patterns are provided, which are stacked on the second fin-type active region as a second plurality of spaced-apart channel regions of a second FINFET. A first gate structure is provided on the plurality of first semiconductor patterns. This first gate structure includes a first material region, which at least partially fills spaces between the first plurality of spaced-apart channel regions. A second gate structure is also provided on the plurality of second semiconductor patterns. The second gate structure includes second and third material regions, which at least partially fill spaces between the second plurality of spaced-apart channel regions.
公开/授权文献
- US11990473B2 Integrated circuits and method of manufacturing the same 公开/授权日:2024-05-21
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