- 专利标题: STRUCTURE WITH CONDUCTIVE FEATURE AND METHOD OF FORMING SAME
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申请号: US17564550申请日: 2021-12-29
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公开(公告)号: US20220208702A1公开(公告)日: 2022-06-30
- 发明人: Cyprian Emeka Uzoh
- 申请人: Invensas Bonding Technologies, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
An element is disclosed. The element can include a non-conductive structure having a non-conductive bonding surface, a cavity at least partially extending through a portion of a thickness of the non-conductive structure from the non-conductive bonding surface, and a conductive pad disposed in the cavity. The cavity has a bottom side and a sidewall. The conductive pad has a bonding surface and a back side opposite the bonding surface. An average size of the grains at the bonding surface is smaller than an average size of the grains adjacent the bottom side of the cavity. The conductive pad can include a crystal structure with grains oriented along a 111 crystal plane. The element can be bonded to another element to form a bonded structure. The element and the other element can be directly bonded to one another without an intervening adhesive.
公开/授权文献
- US2596870A Repeating magazine slingshot 公开/授权日:1952-05-13
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