- 专利标题: METHODS AND APPARATUS FOR IN-SITU DEPOSITION MONITORING
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申请号: US17019949申请日: 2020-09-14
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公开(公告)号: US20220081758A1公开(公告)日: 2022-03-17
- 发明人: Xiaodong WANG , Michael Charles KUTNEY , Varoujan CHAKARIAN , Jianxin LEI , Rongjun WANG
- 申请人: APPLIED MATERIALS, INC.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23C14/54
- IPC分类号: C23C14/54 ; C23C14/50 ; C23C14/24
摘要:
Methods and apparatus that monitors deposition on a shutter disk in-situ. In some embodiments that apparatus may include a process chamber with an internal processing volume, an enclosure disposed external to the internal processing volume where the enclosure accepts a shutter disk when the shutter disk is not in use in the internal processing volume, a shutter disk arm that moves the shutter disk back and forth from the enclosure to the internal processing volume, and at least one sensor integrated into the enclosure. The at least one sensor is configured to determine at least one film property of a material deposited on the shutter disk after a pasting process in the internal processing volume.
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