- 专利标题: Connection Between Source/Drain And Gate
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申请号: US16945146申请日: 2020-07-31
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公开(公告)号: US20220037340A1公开(公告)日: 2022-02-03
- 发明人: Chih-Chuan Yang , Chia-Hao Pao , Yu-Kuan Lin , Lien Jung Hung , Ping-Wei Wang , Shih-Hao Lin
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L27/11
- IPC分类号: H01L27/11 ; H01L27/092 ; H01L29/06 ; H01L29/423 ; H01L29/786 ; H01L21/02 ; H01L21/8238 ; H01L29/66
摘要:
A semiconductor device according to the present disclosure includes a gate extension structure, a first source/drain feature and a second source/drain feature, a vertical stack of channel members extending between the first source/drain feature and the second source/drain feature along a direction, and a gate structure wrapping around each of the vertical stack of channel members. The gate extension structure is in direct contact with the first source/drain feature.
公开/授权文献
- US11450673B2 Connection between source/drain and gate 公开/授权日:2022-09-20
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