Invention Application
- Patent Title: DUAL PORT REMOTE PLASMA CLEAN ISOLATION VALVE
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Application No.: US16642827Application Date: 2018-09-28
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Publication No.: US20200217423A1Publication Date: 2020-07-09
- Inventor: Benjamin B. RIORDON , Charles T. CARLSON , Aaron WEBB , Gary WYKA
- Applicant: Applied Materials, Inc.
- International Application: PCT/US18/53403 WO 20180928
- Main IPC: F16K1/20
- IPC: F16K1/20 ; F16K49/00 ; F16K51/02 ; H01J37/32

Abstract:
The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.
Public/Granted literature
- US11306824B2 Dual port remote plasma clean isolation valve Public/Granted day:2022-04-19
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