Invention Application
- Patent Title: SYSTEMS AND PROCESSES FOR PLASMA FILTERING
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Application No.: US16167074Application Date: 2018-10-22
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Publication No.: US20190119815A1Publication Date: 2019-04-25
- Inventor: Soonam Park , Toan Q. Tran , Nikolai Kalnin , Dmitry Lubomirsky , Akhil Devarakonda
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/3065 ; H01L21/311 ; H01L21/02

Abstract:
Systems and methods may be used to enact plasma filtering. Exemplary processing chambers may include a showerhead. The processing chambers may include a substrate support. The processing chambers may include a power source electrically coupled with the substrate support and configured to provide power to the substrate support to produce a bias plasma within a processing region defined between the showerhead and the substrate support. The processing systems may include a plasma screen coupled with the substrate support and configured to substantially eliminate plasma leakage through the plasma screen. The plasma screen may be coupled with electrical ground.
Information query
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