发明申请
- 专利标题: BLOCK COPOLYMER
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申请号: US15479705申请日: 2017-04-05
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公开(公告)号: US20170204216A1公开(公告)日: 2017-07-20
- 发明人: Yuji NAMIE , Shinya Minegishi , Tomoki Nagai , Takuo Sone
- 申请人: JSR CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: JSR CORPORATION
- 当前专利权人: JSR CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-245991 20111109; JP2012-180689 20120816
- 主分类号: C08F297/02
- IPC分类号: C08F297/02 ; H01L21/027 ; G03F7/20
摘要:
A block copolymer includes a polystyrene block including a styrene unit, and a polyalkyl (meth)acrylate block including an alkyl (meth)acrylate unit. The block copolymer includes an organic group that is bound to at least one end of a main chain of the block copolymer and that comprises a hetero atom. A polymerization initiation end of the block copolymer includes a structure derived from an alkyl lithium. The organic group included in the block copolymer includes a nitrogen atom, a sulfur atom, a phosphorus atom, a tin atom, or a combination thereof, or is represented by formula (1). R1 represents a single bond or a divalent organic group having 1 to 30 carbon atoms; and R2 represents a hydrogen atom, an aliphatic linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms, or the like.
公开/授权文献
- US10308752B2 Block copolymer 公开/授权日:2019-06-04
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