- 专利标题: LIGHT CHANNELS WITH MULTI-STEP ETCH
-
申请号: US14957464申请日: 2015-12-02
-
公开(公告)号: US20170162621A1公开(公告)日: 2017-06-08
- 发明人: Yin Qian , Dyson H. Tai , Chia-Chun Miao , Chen-Wei Lu
- 申请人: OMNIVISION TECHNOLOGIES, INC.
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
An image sensor includes a plurality of photodiodes disposed in a semiconductor layer, a first isolation layer, and a dielectric filler. The dielectric filler is disposed in a trench in the first isolation layer, and the first isolation layer is disposed between the semiconductor layer and the dielectric filler. At least one additional isolation layer is disposed proximate to the first isolation layer, and a plurality of light channels in the at least one additional isolation layer extend through the at least one additional isolation layer to the dielectric filler. The plurality of light channels is disposed to direct light into the plurality of photodiodes.
信息查询
IPC分类: