发明申请
- 专利标题: SUPER-RESOLUTION OBSERVATION DEVICE AND SUPER-RESOLUTION OBSERVATION METHOD
-
申请号: US15276397申请日: 2016-09-26
-
公开(公告)号: US20170082546A1公开(公告)日: 2017-03-23
- 发明人: Fumihiro DAKE , Hiroki YAZAWA
- 申请人: NIKON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NIKON CORPORATION
- 当前专利权人: NIKON CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-075615 20140401
- 主分类号: G01N21/64
- IPC分类号: G01N21/64 ; G02B21/36 ; G02B21/16 ; G01N21/63 ; G02B21/08 ; G02F1/11
摘要:
A super-resolution observation device includes an illumination optical system that focus a first illuminating light at optical frequency ω1 and a second illuminating light at optical frequency ω2 on a region of an observation object plane; a modulation unit that modulates a property of the first illuminating light heading toward the region at a modulation frequency fm; and an extraction unit that extracts a component at the optical frequency ω1 or ω2 from a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency fm.
公开/授权文献
信息查询