发明申请
US20150262787A1 ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURING BEAM ENERGY
有权
离子植入物，光束能量测量装置和测量光束能量的方法
- 专利标题： ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURING BEAM ENERGY
- 专利标题（中）： 离子植入物，光束能量测量装置和测量光束能量的方法
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申请号： US14656132申请日： 2015-03-12
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公开(公告)号： US20150262787A1公开(公告)日： 2015-09-17
- 发明人: Haruka Sasaki , Kazuhiro Watanabe , Hiroyuki Kariya
- 申请人： SEN Corporation
- 优先权： JP2014-052176 20140314
- 主分类号： H01J37/244
- IPC分类号： H01J37/244 ; H01J37/147 ; H01J37/317
摘要：
A beam energy measuring device in an ion implanter includes a parallelism measuring unit that measures a parallelism of an ion beam at a downstream of a beam collimator of the ion implanter and an energy calculating unit that calculates an energy of the ion beam from the measured parallelism. The ion implanter may further include a control unit that controls a high energy multistage linear acceleration unit based on the measured energy of the ion beam so that the ion beam has a target energy.
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