Invention Application
- Patent Title: INTEGRATED CIRCUIT DEVICES INCLUDING STRAINED CHANNEL REGIONS AND METHODS OF FORMING THE SAME
- Patent Title (中): 包含应变通道区域的集成电路装置及其形成方法
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Application No.: US14304008Application Date: 2014-06-13
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Publication No.: US20150123075A1Publication Date: 2015-05-07
- Inventor: Ryan M. Hatcher , Mark S. Rodder , Robert C. Bowen , Jorge A. Kittl
- Applicant: Samsung Electronics Co., Ltd.
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/15 ; H01L29/78

Abstract:
Integrated circuit devices including strained channel regions and methods of forming the same are provided. The integrated circuit devices may include enhancement-mode field effect transistors. The enhancement-mode field effect transistors may include a quantum well channel region having a well thickness TW sufficient to yield a strain-induced splitting of a plurality of equivalent-type electron conduction states therein to respective unequal energy levels including a lowermost energy level associated with a lowermost surface roughness scattering adjacent a surface of the channel region when, the surface is biased into a state of inversion.
Public/Granted literature
- US09525053B2 Integrated circuit devices including strained channel regions and methods of forming the same Public/Granted day:2016-12-20
Information query
IPC分类: