发明申请
- 专利标题： PLASMA RESISTANT CERAMIC COATED CONDUCTIVE ARTICLE
- 专利标题（中）： 耐等级陶瓷涂层导电制品
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申请号： US13687512申请日： 2012-11-28
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公开(公告)号： US20130284373A1公开(公告)日： 2013-10-31
- 发明人: Jennifer Y. Sun , Biraja P. Kanungo , Ren-Guan Duan , Hamid Noobakhsh , Junhan Yuh , Dmitry Lubomirsky
- 申请人： APPLIED MATERIALS, INC.
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： C23F1/08
- IPC分类号： C23F1/08 ; B23K10/00 ; H05K1/05 ; B05D3/00
摘要：
To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
公开/授权文献
- US09394615B2 Plasma resistant ceramic coated conductive article 公开/授权日：2016-07-19
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