发明申请
US20100289383A1 PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE WITH THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY WITH THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER WITH THE PIEZOELECTRIC GENERATING ELEMENT
有权
压电薄膜及其制造方法，喷墨头，用喷墨头形成图像的方法，角速度传感器，用角速度传感器，压电发生元件测量角速度的方法，以及生成电力的方法 压电元件
- 专利标题： PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE WITH THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY WITH THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER WITH THE PIEZOELECTRIC GENERATING ELEMENT
- 专利标题（中）： 压电薄膜及其制造方法，喷墨头，用喷墨头形成图像的方法，角速度传感器，用角速度传感器，压电发生元件测量角速度的方法，以及生成电力的方法 压电元件
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申请号： US12844582申请日： 2010-07-27
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公开(公告)号： US20100289383A1公开(公告)日： 2010-11-18
- 发明人: Takakiyo HARIGAI , Hideaki ADACHI , Eiji FUJII
- 申请人： Takakiyo HARIGAI , Hideaki ADACHI , Eiji FUJII
- 申请人地址： JP Osaka
- 专利权人： PANASONIC CORPORATION
- 当前专利权人： PANASONIC CORPORATION
- 当前专利权人地址： JP Osaka
- 优先权： JP2009-009495 20090120
- 主分类号： H02N2/18
- IPC分类号： H02N2/18 ; H01L41/18 ; H01L41/22 ; B41J2/045 ; G01C19/56
摘要：
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention includes: a LaNiO3 film having a (001) orientation; an interface layer having a (001) orientation and composed of a compound represented by a chemical formula ABO3 (where A is represented by (Bi,Na)1-xCx (0≦x≦1), B is Ti or TiZr, and C is an alkali metal other than Na); and a (Bi,Na,Ba)TiO3 film having a (001) orientation. The LaNiO3 film, the interface layer, and the (Bi,Na,Ba)TiO3 film are laminated in this order.
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