发明申请
- 专利标题： Compound semiconductor devices and methods of manufacturing the same
- 专利标题（中）： 复合半导体器件及其制造方法
-
申请号： US11202126申请日： 2005-08-11
-
公开(公告)号： US20060205197A1公开(公告)日： 2006-09-14
- 发明人: Gyu-Chul Yi , Sung-Jin An , Yong-Jin Kim , Dong-Kun Lee
- 申请人： Gyu-Chul Yi , Sung-Jin An , Yong-Jin Kim , Dong-Kun Lee
- 申请人地址： KR Gyeongsangbuk-do KR Pohang-shi
- 专利权人： SILTRON INC.,POSTECH FOUNDATION
- 当前专利权人： SILTRON INC.,POSTECH FOUNDATION
- 当前专利权人地址： KR Gyeongsangbuk-do KR Pohang-shi
- 优先权： KR10-2005-0019605 20050309
- 主分类号： H01L31/00
- IPC分类号： H01L31/00 ; H01L21/3205 ; H01L29/739 ; H01L21/4763
摘要：
A compound semiconductor device and method of manufacturing the same. The method includes coating a plurality of spherical balls on a substrate and selectively growing a compound semiconductor thin film on the substrate on which the spherical balls are coated. The entire process can be simplified and a high-quality compound semiconductor thin film can be grown in a short amount of time in comparison to an epitaxial lateral overgrowth (ELO) method.
公开/授权文献
- US1736805A Elevator-door-locking gear 公开/授权日：1929-11-26
信息查询
IPC分类:
