发明申请
- 专利标题: Micro-electromechanical switch array
- 专利标题(中): 微机电开关阵列
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申请号: US11046325申请日: 2005-01-27
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公开(公告)号: US20050236260A1公开(公告)日: 2005-10-27
- 发明人: Nicholas Pasch , Glenn Sanders , Hajime Seki
- 申请人: Nicholas Pasch , Glenn Sanders , Hajime Seki
- 申请人地址: US CA Menlo Park
- 专利权人: Rolltronics Corporation
- 当前专利权人: Rolltronics Corporation
- 当前专利权人地址: US CA Menlo Park
- 主分类号: H01H57/00
- IPC分类号: H01H57/00 ; H01H59/00
摘要:
Micro-electromechanical devices having an improved flexible layer enable the use of material having a wider range of elastic modulus. The MEM devices include a substantially non-pliable layer and a substantially flexible layer both of which include electrodes that when energized will create electrostatic forces that attracts the flexible layer to the non-pliable layer. The flexible layer has perforations or apertures cut into the flexible layer of a MEMs device to alter operational properties such as electrostatic sensitivity, resonance frequency, rate of change of sensitivity above the resonance frequency, oscillating mass, panel stiffness and others parameters.
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