Invention Grant
- Patent Title: Method for manufacturing memory device
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Application No.: US18519230Application Date: 2023-11-27
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Publication No.: US12114514B2Publication Date: 2024-10-08
- Inventor: Feng-Min Lee , Erh-Kun Lai , Dai-Ying Lee , Yu-Hsuan Lin , Po-Hao Tseng , Ming-Hsiu Lee
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- The original application number of the division: US17392365 2021.08.03
- Main IPC: H10N50/01
- IPC: H10N50/01 ; H10B61/00 ; H10B63/00 ; H10N70/00

Abstract:
A memory device and a method for manufacturing the memory device are provided. The memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.
Public/Granted literature
- US20240090238A1 METHOD FOR MANUFACTURING MEMORY DEVICE Public/Granted day:2024-03-14
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