发明授权
- 专利标题: Thermally conductive slugs/active dies to improve cooling of stacked bottom dies
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申请号: US16721809申请日: 2019-12-19
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公开(公告)号: US12094800B2公开(公告)日: 2024-09-17
- 发明人: Zhimin Wan , Jin Yang , Chia-Pin Chiu , Peng Li , Deepak Goyal
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt P.C.
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L23/367 ; H01L25/065 ; H01L25/18 ; H01L23/00 ; H01L23/373 ; H01L23/538
摘要:
Embodiments include semiconductor packages. A semiconductor package includes first and second bottom dies on a package substrate, first top dies on the first bottom die, and second top dies on the second bottom die. The semiconductor package includes thermally conductive slugs on the first bottom die and the second bottom die. The thermally conductive slugs are comprised of a high thermal conductive material. The thermally conductive slugs are positioned directly on outer edges of top surfaces of the first and second bottom dies, inner edges of the top surfaces of the first and second bottom dies, and/or a top surface of the package substrate. The high thermal conductive material of the thermally conductive slugs is comprised of copper, silver, boron nitride, or graphene. The thermally conductive slugs may have two different thicknesses. The semiconductor package may include an active die and/or an integrated heat spreader with the pedestals.
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