- Patent Title: Three-dimensional memory devices having first semiconductor structure bonded with second semiconductor structure each including peripheral circuit and methods for forming the same
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Application No.: US17481803Application Date: 2021-09-22
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Publication No.: US12082408B2Publication Date: 2024-09-03
- Inventor: Yuancheng Yang , Wenxi Zhou , Zhiliang Xia , Wei Liu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., ˜LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., ˜LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H10B41/41
- IPC: H10B41/41 ; G11C16/04 ; G11C16/10 ; G11C16/26 ; H01L23/528 ; H10B41/27 ; H10B41/35 ; H10B41/40 ; H10B43/27 ; H10B43/35 ; H10B43/40

Abstract:
In certain aspects, a three-dimensional (3D) memory device includes a first semiconductor structure, a second semiconductor structure, and a bonding interface between the first and second semiconductor structures. The first semiconductor structure includes an array of NAND memory strings, a first peripheral circuit of the array of NAND memory strings including a first transistor, a polysilicon layer between the array of NAND memory strings and the first peripheral circuit, and a first semiconductor layer in contact with the first transistor. The polysilicon layer is in contact with sources of the array of NAND memory strings. The second semiconductor structure includes a second peripheral circuit of the array of NAND memory strings including a second transistor, and a second semiconductor layer in contact with the second transistor. The second peripheral circuit is between the bonding interface and the second semiconductor layer. The first semiconductor layer is between the polysilicon layer and the second semiconductor layer.
Public/Granted literature
- US20230005543A1 THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2023-01-05
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