Invention Grant
- Patent Title: Modular microwave source with multiple metal housings
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Application No.: US16898259Application Date: 2020-06-10
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Publication No.: US12033835B2Publication Date: 2024-07-09
- Inventor: Philip Allan Kraus , Robert Moore , James Carducci , Richard Fovell , Sathya Swaroop Ganta , Karthikeyan Balaraman , Silverst Rodrigues
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Embodiments disclosed herein include a modular microwave source array. In an embodiment, a housing assembly for the source array comprises a first conductive layer, wherein the first conductive layer comprises a first coefficient of thermal expansion (CTE), and a second conductive layer over the first conductive layer, wherein the second conductive layer comprises a second CTE that is different than the first CTE. In an embodiment, the housing assembly further comprises a plurality of openings through the housing assembly, where each opening passes through the first conductive layer and the second conductive layer.
Public/Granted literature
- US20210391149A1 MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS Public/Granted day:2021-12-16
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