- 专利标题: Semiconductor device and method of manufacturing semiconductor device
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申请号: US17314774申请日: 2021-05-07
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公开(公告)号: US12022655B2公开(公告)日: 2024-06-25
- 发明人: Hyun Ho Lee
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si
- 代理机构: WILLIAM PARK & ASSOCIATES LTD.
- 优先权: KR 20200148739 2020.11.09
- 主分类号: H10B43/10
- IPC分类号: H10B43/10 ; H10B41/27 ; H10B43/27 ; H10B63/00
摘要:
A semiconductor device and a method of manufacturing same may include a stack including alternately stacked conductive layers and insulating layers, a separation insulating structure passing through the stack, and including a line pattern, first protrusion patterns protruded from the line pattern to one side, and second protrusion patterns protruded from the line pattern to another side, first channel structures passing through the stack at the one side of the separation insulating structure and surrounding the first protrusion patterns, respectively, and second channel structures passing through the stack at the another side of the separation insulating structure and surrounding the second protrusion patterns, respectively.
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