- 专利标题: Semiconductor device
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申请号: US17114598申请日: 2020-12-08
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公开(公告)号: US11949012B2公开(公告)日: 2024-04-02
- 发明人: Jong Ho Park , Wan Don Kim , Weon Hong Kim , Hyeon Jun Baek , Byoung Hoon Lee , Jeong Hyuk Yim , Sang Jin Hyun
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR 20180078126 2018.07.05 KR 20190001698 2019.01.07
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L27/088 ; H01L29/49 ; H01L29/51
摘要:
A semiconductor device including: a first transistor which include a first gate stack on a substrate; and a second transistor which includes a second gate stack on the substrate, wherein the first gate stack includes a first ferroelectric material layer disposed on the substrate, a first work function layer disposed on the first ferroelectric material layer and a first upper gate electrode disposed on the first work function layer, wherein the second gate stack includes a second ferroelectric material layer disposed on the substrate, a second work function layer disposed on the second ferroelectric material layer and a second upper gate electrode disposed on the second work function layer, wherein the first work function layer includes the same material as the second work function layer, and wherein an effective work function of the first gate stack is different from an effective work function of the second gate stack.
公开/授权文献
- US20210119058A1 SEMICONDUCTOR DEVICE 公开/授权日:2021-04-22
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