发明授权
- 专利标题: Suctioning method
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申请号: US16763859申请日: 2018-11-09
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公开(公告)号: US11947140B2公开(公告)日: 2024-04-02
- 发明人: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
- 申请人: HAMAMATSU PHOTONICS K.K.
- 申请人地址: JP Hamamatsu
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu
- 代理机构: Faegre Drinker Biddle & Reath LLP
- 优先权: JP 17221853 2017.11.17
- 国际申请: PCT/JP2018/041726 2018.11.09
- 国际公布: WO2019/098141A 2019.05.23
- 进入国家日期: 2020-05-13
- 主分类号: B25B11/00
- IPC分类号: B25B11/00 ; B25J15/06 ; G02B5/28 ; H01L21/67 ; H01L21/68
摘要:
A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
公开/授权文献
- US20210364681A1 SUCTIONING METHOD 公开/授权日:2021-11-25
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