- 专利标题: High aspect ratio shared contacts
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申请号: US17507385申请日: 2021-10-21
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公开(公告)号: US11935929B2公开(公告)日: 2024-03-19
- 发明人: Ruilong Xie , Julien Frougier , Su Chen Fan , Ravikumar Ramachandran , Nicolas Loubet
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 L. Jeffrey Kelly
- 主分类号: H01L29/417
- IPC分类号: H01L29/417 ; H01L21/8238 ; H01L23/528 ; H01L27/092 ; H01L29/40 ; H01L29/45
摘要:
A stacked device is provided. The stacked device includes a reduced height active device layer, and a plurality of lower source/drain regions in the reduced height active device layer. The stacked device further includes a lower interlayer dielectric (ILD) layer on the plurality of lower source/drain regions, and a conductive trench spacer in the lower interlayer dielectric (ILD) layer, wherein the conductive trench spacer is adjacent to one of the plurality of lower source/drain regions. The stacked device further includes a top active device layer adjacent to the lower interlayer dielectric (ILD) layer, and an upper source/drain section in the top active device layer. The stacked device further includes a shared contact in electrical connection with the upper source/drain section, the conductive trench spacer, and the one of the plurality of lower source/drain regions.
公开/授权文献
- US20230130305A1 HIGH ASPECT RATIO SHARED CONTACTS 公开/授权日:2023-04-27
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