- 专利标题: Semiconductor memory device with selection patterns, storage patterns, and a gap fill layer and method for fabricating the same
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申请号: US17364378申请日: 2021-06-30
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公开(公告)号: US11856794B2公开(公告)日: 2023-12-26
- 发明人: Dong Sung Choi , Jong Uk Kim , Kwang Min Park , Zhe Wu , Ja Bin Lee , Jae Ho Jung
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR 20200105869 2020.08.24
- 主分类号: H10B63/00
- IPC分类号: H10B63/00 ; H10N70/00
摘要:
A semiconductor memory device includes a first memory cell provided on a substrate, a second memory cell provided on the substrate and spaced apart from the first memory cell, a passivation layer extending along a side surface of the first memory cell and a side surface of the second memory cell, and a gap fill layer covering the passivation layer. Each of the first memory cell and the second memory cell includes a selection pattern having ovonic threshold switching characteristics, and a storage pattern provided on the selection pattern. The passivation layer includes a lower portion filling a space between the selection pattern of the first memory cell and the selection pattern of the second memory cell, and an upper portion extending along a side surface of the storage pattern of each of the first memory cell and the second memory cell.
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